Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347995 | Chamber device, gas laser device, and electronic device manufacturing method | Rei TAKENAKA, Masanori TERAMOTO, Jeffrey P. Sercel | 2025-07-01 |
| 12327975 | Chamber device, and electronic device manufacturing method | Takahiro Tatsumi, Kazuki Nagai, Jeffrey P. Sercel | 2025-06-10 |