Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398469 | Methods and systems for producing conformal thin films | Alain E. Kaloyeros | 2025-08-26 |
| 12378666 | Silicon carbide thin films and vapor deposition methods thereof | Alain E. Kaloyeros | 2025-08-05 |
| 12344934 | Silicon-based thin films from N-alkyl substituted perhydridocyclotrisilazanes | Alain E. Kaloyeros | 2025-07-01 |