Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398819 | Controller and vaporization supply device | Atsushi Hidaka, Kazuteru Tanaka, Takatoshi NAKATANI, Kazuyuki Morisaki, Masafumi Kitano +3 more | 2025-08-26 |
| 12334355 | Pressure control device | Kouji Nishino, Katsuyuki Sugita, Shinya Ogawa, Keisuke Ideguchi | 2025-06-17 |
| 12306647 | Flow rate control device and flow rate control method wherein an internal command signal is generated by a combination of first order lag process and ramp process | Katsuyuki Sugita, Kouji Nishino, Shinya Ogawa, Keisuke Ideguchi | 2025-05-20 |