Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243767 | Substrate support assembly and substrate processing apparatus | Sang Don Lee, Yong-Ki Kim, Sung Gyun SON, Jae-Woo Kim | 2025-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243767 | Substrate support assembly and substrate processing apparatus | Sang Don Lee, Yong-Ki Kim, Sung Gyun SON, Jae-Woo Kim | 2025-03-04 |