Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12318881 | Substrate polishing apparatus and substrate polishing method | Takuya Fujimoto | 2025-06-03 |
| 12211733 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2025-01-28 |