Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359339 | Plating apparatus and substrate holder operation method | Masaki Tomita | 2025-07-15 |
| 12347697 | Prewet module and prewet method | — | 2025-07-01 |
| 12270120 | Plating apparatus and plating method | Masaki Tomita, Masashi Shimoyama, Shao Hua Chang | 2025-04-08 |
| 12247311 | Plating apparatus and plating process method | Shao Hua Chang, Yasuyuki Masuda | 2025-03-11 |