Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257666 | Surface height measurement method using dummy disk | Yasuyuki Motoshima | 2025-03-25 |
| 12226825 | Buffer chamber and AM system including a buffer chamber | Junki Asai, Yoshitaka Mukaiyama | 2025-02-18 |
| 12208488 | Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus | — | 2025-01-28 |