Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228858 | Coating composition for forming resist underlayer film for EUV lithography process | Jae Hwan Sim, Suwoong Kim, Jin Hong Park, Myung Yeol Kim, Jae-Bong Lim | 2025-02-18 |