Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12396103 | Device for etching the periphery edge of a substrate and method for controlling etching thereof | — | 2025-08-19 |
| 12308256 | Substrate treatment apparatus having bowl assembly | — | 2025-05-20 |
| 12237205 | Substrate support assembly for substrate treatment apparatus | — | 2025-02-25 |
| 12237206 | Device for etching the periphery edge of a substrate | — | 2025-02-25 |