Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417909 | Surface processing apparatus and surface processing method for SiC substrate | Kazufumi Aoki, Naoki Maruno, Bahman SOLTANI, Yuya Kato, Shinji Mukota +4 more | 2025-09-16 |