Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360466 | Maintenance of modules for light sources used in semiconductor photolithography | Russell Allen Burdt, Kumar Raja Guvindan Raju, David Wesley Manley | 2025-07-15 |
| 12216411 | Predictive apparatus in a gas discharge light source | — | 2025-02-04 |