Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12290778 | Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber | Seo Young Maeng, Il Jun Jeon, Jin Hong Kim, Young Seok Roh, Jong Yong Bae +1 more | 2025-05-06 |