Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321105 | Projection exposure apparatus for semiconductor lithography | Timo Laufer | 2025-06-03 |
| 12321106 | Device for detecting a temperature, installation for producing an optical element and method for producing an optical element | Timo Laufer | 2025-06-03 |