Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386263 | Reflective optical element, illumination optical unit, projection exposure apparatus, and method for producing a protective layer | Sandro Hoffmann, Sandra Haschke | 2025-08-12 |
| 12326663 | Optical component | — | 2025-06-10 |