Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372883 | Field facet for a field facet mirror of a projection exposure system | — | 2025-07-29 |
| 12353137 | Field facet system and lithography apparatus | Arno Schmittner, Willi Anderl, Joram Rosseels, Rob Janssen | 2025-07-08 |