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Michael Budach

CG Carl Zeiss Smt Gmbh: 1 patents #35 of 136Top 30%
Overall (2025): #282,359 of 469,880Top 65%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12292680 Method and apparatuses for disposing of excess material of a photolithographic mask Christof Baur, Klaus Edinger, Tristan Bret 2025-05-06