Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292690 | Insert for a source chamber of an EUV radiation source | Michael Hagg, Juan Jose Hasbun Wood, Christof Metzmacher | 2025-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292690 | Insert for a source chamber of an EUV radiation source | Michael Hagg, Juan Jose Hasbun Wood, Christof Metzmacher | 2025-05-06 |