Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12307334 | Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography process | Dirk Seidel, Alexander Freytag, Susanne Töpfer, Carsten Schmidt, Christoph Husemann | 2025-05-20 |