Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |