Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271115 | Method to detect a defect on a lithographic sample and metrology system to perform such a method | Lars Omlor | 2025-04-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271115 | Method to detect a defect on a lithographic sample and metrology system to perform such a method | Lars Omlor | 2025-04-08 |