Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405104 | Measurement apparatus, method for measuring by interferometry, processing method, optical element and lithography system | Stefan Schulte, Vladan Blahnik | 2025-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405104 | Measurement apparatus, method for measuring by interferometry, processing method, optical element and lithography system | Stefan Schulte, Vladan Blahnik | 2025-09-02 |