Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386274 | Stage device, lithography apparatus, and article manufacturing method | — | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386274 | Stage device, lithography apparatus, and article manufacturing method | — | 2025-08-12 |