Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300522 | Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same | Alireza Aghili | 2025-05-13 |
| 12283522 | Planarization apparatus, planarization process, and method of manufacturing an article | Seth J. Bamesberger, Christopher Ellis Jones, Se-Hyuk Im | 2025-04-22 |