Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393128 | Exposure apparatus, exposure method, and article manufacturing method | Takahiro Takiguchi, Jun Kawashima | 2025-08-19 |
| 12386272 | Exposure apparatus, control method of exposure apparatus, information processing apparatus, information processing method, and article manufacturing method | — | 2025-08-12 |