Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427552 | Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system | — | 2025-09-30 |
| 12292368 | Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing method | Masami Yonekawa, Toshihiro Ifuku | 2025-05-06 |