Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266554 | Substrate processing apparatus | Roumen Botev | 2025-04-01 |
| 12206342 | Substrate processing apparatus | Vincent W. Tsang, Karanjit Singh Saini, Robert T. Caveney, Robert C. May, Daniel Babbs | 2025-01-21 |