Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394593 | Power control method and device of lower radio frequency power supply and semiconductor processing equipment | Jing Wei, Yu Zhang, Gang Wei, Guodao SHAN, Chenyu Zhong +1 more | 2025-08-19 |