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Xingfei MAO

BC Beijing Naura Microelectronics Equipment Co.: 1 patents #18 of 69Top 30%
Overall (2025): #170,792 of 469,880Top 40%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12191114 Semiconductor reaction chamber and atomic layer plasma etching apparatus Masaya Odagiri, Gang Wei, Guodong Chen 2025-01-07