Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377520 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | — | 2025-08-05 |
| 12217979 | Temperature controlled substrate carrier and polishing components | John Kevin Shugrue | 2025-02-04 |
| 12198935 | Atmospheric plasma in wafer processing system optimization | Robert C. Roberts | 2025-01-14 |