Shu Satoh

AT Axcelis Technologies: 1 patents #1 of 5Top 20%

📍 Byfield, MA: #1 of 4 inventorsTop 25%

🗺 Massachusetts: #3,706 of 11,797 inventorsTop 35%

Overall (2025): #216,132 of 469,880Top 50%

Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
12431332	High energy implanter with small footprint	Wilhelm Platow, Neil J. Bassom	2025-09-30