Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366810 | Radiation source | Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt | 2025-07-22 |
| 12332541 | Method for generating broadband radiation and associated broadband source and metrology device | — | 2025-06-17 |