Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392732 | Multi-source illumination unit and method of operating the same | Jian Zhang, Zhiwen KANG | 2025-08-19 |
| 12368067 | Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspection of wafer | Shibing Liu, Ying Luo | 2025-07-22 |
| 12217927 | Beam manipulation of advanced charge controller module in a charged particle system | Jian Zhang, Ning Ye, Zhiwen KANG | 2025-02-04 |