Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12247883 | Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system | Engelbertus Antonius Fransiscus Van Der Pasch, Koen Govert Olivier VAN DE MEERAKKER, Ivo Widdershoven | 2025-03-11 |