Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197140 | Substrate table, immersion lithographic apparatus and device manufacturing method | Marco Koert Stavenga, Sergei Shulepov, Koen Steffens, Samuel Bertrand Dominique David, David Bessems | 2025-01-14 |