Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189312 | Reticle gripper damper and isolation system for lithographic apparatuses | Roberto B. Wiener, Peter Kochersperger, Boris Kogan, Robert Wade, Shaun Evans | 2025-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189312 | Reticle gripper damper and isolation system for lithographic apparatuses | Roberto B. Wiener, Peter Kochersperger, Boris Kogan, Robert Wade, Shaun Evans | 2025-01-07 |