Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411415 | Lithographic apparatus and method for illumination uniformity correction | Nikolaos Sotiropoulos, Albertus HARTGERS, Michael Frederik Ypma | 2025-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411415 | Lithographic apparatus and method for illumination uniformity correction | Nikolaos Sotiropoulos, Albertus HARTGERS, Michael Frederik Ypma | 2025-09-09 |