Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305979 | Interferometer system and lithographic apparatus | — | 2025-05-20 |
| 12306548 | Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing method | — | 2025-05-20 |
| 12270644 | Compact dual pass interferometer for a plane mirror interferometer | — | 2025-04-08 |
| 12270647 | Method for calibration of an optical measurement system and optical measurement system | Ping Liu | 2025-04-08 |