Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417911 | Method and system for forming silicon nitride layer using low radio frequency plasma process | Makoto Igarashi | 2025-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417911 | Method and system for forming silicon nitride layer using low radio frequency plasma process | Makoto Igarashi | 2025-09-16 |