Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431355 | Method and system for forming patterned features on a surface of a substrate using a plasma-enhanced cyclical deposition process | Seunghyun Lee, Hyunchul Kim, Naoki Inoue | 2025-09-30 |
| 12243742 | Method for processing a substrate | Seunghyun Lee, Hyunchul Kim, SeungWoo Choi | 2025-03-04 |