Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230531 | Substrate supporting apparatus, substrate processing apparatus including the same, and substrate processing method | Seung Woo Choi, Seung Hwan Lee | 2025-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230531 | Substrate supporting apparatus, substrate processing apparatus including the same, and substrate processing method | Seung Woo Choi, Seung Hwan Lee | 2025-02-18 |