Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365983 | Methods for forming a boron nitride film by a plasma enhanced atomic layer deposition process | — | 2025-07-22 |
| 12230497 | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process | Aurélie Kuroda | 2025-02-18 |