CL

Chi-Hsing Lin

TSMC: 1 patents #2,025 of 3,957Top 55%
Overall (2025): #425,064 of 469,880Top 95%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12261026 Method and apparatus for revitalizing plasma processing tools Chen-Fon CHANG, Chun-Yi Wu, Shi-Yu Ke, Chih-Teng Liao 2025-03-25