Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261026 | Method and apparatus for revitalizing plasma processing tools | Chen-Fon CHANG, Chun-Yi Wu, Shi-Yu Ke, Chih-Teng Liao | 2025-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261026 | Method and apparatus for revitalizing plasma processing tools | Chen-Fon CHANG, Chun-Yi Wu, Shi-Yu Ke, Chih-Teng Liao | 2025-03-25 |