Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347674 | Directional selective deposition | Bhargav S. Citla, Soham Asrani, Joshua Rubnitz, Ellie Yieh | 2025-07-01 |
| 12315718 | Forming films with improved film quality | Bhargav S. Citla, Purvam Modi, Ellie Yieh | 2025-05-27 |
| 12305279 | Ultra high-k hafnium oxide and hafnium zirconium oxide films | Harshil Kashyap, Andrew C. Kummel, Ajay Kumar Yadav, Keith Tatseun Wong, Ellie Yieh | 2025-05-20 |
| 12288717 | Metal based hydrogen barrier | Srinivas Gandikota, Steven C. H. Hung, Yixiong Yang, Susmit Singha Roy, Nikolaos Bekiaris | 2025-04-29 |
| 12288672 | Methods and apparatus for carbon compound film deposition | Qiwei Liang, Chentsau Chris Ying, Ellie Yieh, Erica Chen, Nithin Thomas ALEX | 2025-04-29 |
| 12204246 | Metal oxide resist patterning with electrical field guided post-exposure bake | Huixiong Dai, Mangesh Ashok BANGAR, Steven Hiloong WELCH, Ellie Yieh, Dmitry Lubomirsky | 2025-01-21 |
| 12198951 | High pressure wafer processing systems and related methods | Qiwei Liang, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2025-01-14 |