Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351909 | Gap fill methods using catalyzed deposition | Byunghoon Yoon, Liqi Wu, Joung Joo Lee, Xi Cen, Wei-Sheng Lei +2 more | 2025-07-08 |
| D1066440 | Process chamber pumping liner | Yang Li, Xi Cen, Min-Han Lee, Mehran Behdjat | 2025-03-11 |
| 12191198 | Low resistivity tungsten film and method of manufacture | Feihu Wang, Joung Joo Lee, Xi Cen, Zhibo Yuan, Wei-Sheng Lei +2 more | 2025-01-07 |