Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417903 | Physical vapor deposition source and chamber assembly | Sathiyamurthi GOVINDASAMY, Suresh Palanisamy, Naresh Kumar Asokan, Karunakaran NATARAJ | 2025-09-16 |
| 12249537 | Substrate flipping in vacuum for dual sided PVD sputtering | Suresh Palanisamy, Dinesh Babu Rajamanickam, Naresh Kumar Asokan | 2025-03-11 |
| 12195843 | Multicathode PVD system for high aspect ratio barrier seed deposition | Ming Li | 2025-01-14 |