Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319519 | Carrier transport system, vacuum processing apparatus, and method of transportation of a carrier in a vacuum chamber | — | 2025-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319519 | Carrier transport system, vacuum processing apparatus, and method of transportation of a carrier in a vacuum chamber | — | 2025-06-03 |