Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Paul J. Murphy, Frank Sinclair +4 more | 2025-04-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278124 | Model-based controlled load lock pumping scheme | D. Jeffrey Lischer, Bon-Woong Koo, Dawei Sun, Paul J. Murphy, Frank Sinclair +4 more | 2025-04-15 |