Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431338 | Composite structures for semiconductor process chambers | Tianshu LI, Yikai Chen, Yao-Hung YANG, Saurabh M. Chaudhari | 2025-09-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431338 | Composite structures for semiconductor process chambers | Tianshu LI, Yikai Chen, Yao-Hung YANG, Saurabh M. Chaudhari | 2025-09-30 |