Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400905 | Method of electrostatic chuck motion control for wafer breakage prevention | Junguo LI, Yosuke Tsumita, Andrew Eunbeom Choi | 2025-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400905 | Method of electrostatic chuck motion control for wafer breakage prevention | Junguo LI, Yosuke Tsumita, Andrew Eunbeom Choi | 2025-08-26 |