Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12303992 | Hybrid base plate | — | 2025-05-20 |
| 12308274 | Electrostatic chuck sheet and electrostatic chuck comprising same | Kyungwhan WOO, Byoungsu Jin, Sungbaek DAN, Youngjun AN, Seunggon PARK +1 more | 2025-05-20 |